| 摘要 |
<p>The invention relates to a sublayers support for depositing thin layers of nitrides, oxides and metal carbides, as well as combinations thereof, in magnetic field, by reactive magnetron spraying. According to the invention, the support consists of an integral disk (A) connected or not to some sublayers, on which there are radially or axially mounted some permanent magnets, whose number is equal to 4, 5, 6, 8, 10 or 12, so that the N pole of the magnetic field is directed towards the increasing layer surface.</p> |
