ELECTROSTATIC ACTUATOR, THE METHOD OF ACTUATING THE SAME AND APPLICABLE DEVICES USING THEREOF

摘要

An electrostatic actuator capable of implementing consecutive operation, actuating method thereof, and applicable device using the same are provided to improve durability about an external noise by arbitrarily controlling a driving voltage. An electrostatic actuator capable of implementing consecutive operation comprises a main electrode(620), an electric charge charging part(640), a flow electrode(650), an insulating substrate(610), and a discharge-preventing layer. The electric charge charging part is electrically insulated with the main electrode. The flow electrode is separated with the main electrode and the electric charge charging part. The main electrode is formed in the insulating substrate. The discharge-preventing layer is formed on a surface of the electric charge charging part.