| 摘要 |
<p>A susceptor transfer apparatus is provided to incline the inner side of a pocket of a susceptor transfer arm so that the susceptor is backwards pushed out although the susceptor of the pocket inside collides with an object. In a susceptor transfer apparatus, a plurality of wafers are mounted. The susceptor transfer apparatus comprises a susceptor transfer arm(40) and a pocket portion(50). The susceptor transfer arm transfers to a purpose facility with the motor(10). The pocket portion is formed in the tip-end part of the susceptor transfer arm. The inner side of the pocket portion is inclined so that a part of the circumference of susceptor is set.</p> |
