HEAT SHIELD PLATE FOR SUBSTRATE ANNEALING APPARATUS

摘要

A heat shield plate for a substrate annealing apparatus is provided with a flat-plate-like substrate (1) horizontally supported; a heater (5) positioned above the substrate for heating the upper surface of the substrate with radiation heat; and a heat shield plate (10) which can horizontally move between a shielding position for shielding the substrate from the heater and an open position out of the shielding position. The heat shield plate (10) is composed of a structure member (12) composed of a low thermal expansion material (carbon composite material) which is deformed little due to temperature difference at the shielding position, and a heat insulating member (14) which covers the upper surface of the structure member and keeps the surface at an allowable temperature or below. ® KIPO & WIPO 2009