METHOD OF COATING BARIUM ZIRCON OXIDE

摘要

A barium zircon oxide coating method is provided to improve the quality of a coated device since the BaZrO3 coating is elaborately formed. A BaZrO3 coating method comprises: a step for mounting a BaZrO3 target and substrate to a DC magnetron sputter; a step for injecting gas for reaction into a sputter; and a step for authorizing impulse current to the target and depositing a target material on the substrate. The Ca, Ba, Y and Sr are added to the target. The impulse current is applied to the frequency range of 100 kHz - 500 kHz.