| 摘要 |
A TEM polisher is provided to polish a specimen by reciprocating a specimen mount on a polishing pad and maintain the flatness of polished surface by applying a constant force to the specimen mount. A TEM polisher comprises a polisher body in which a polishing pad(11) is mounted, a linear guide(20) which guides reciprocating motion on the polishing pad, a movable frame(30) reciprocating by the guide of the linear guide, a plate(40) which is combined in order to reciprocate in the perpendicular direction to the moving frame, and a holder(50) which supports a specimen mount(1) to be contacted on the polishing pad at a certain pressure. The holder includes a specimen mount supporting part supporting the specimen mount to move up and down and a weight coupling part(51) in which a weight is combined. |
