发明名称 BANDWIDTH MEASURING DEVICE FOR HIGH PULSE REPETITION RATE PULSED LASER
摘要 <p>A method and apparatus is disclosed which may comprise detecting the bandwidth of laser output light pulses of a pulsed laser utilizing an array of light detecting elements by the steps which may comprise passing a portion of the laser output light produced by the pulsed laser to the array of light detecting elements in a manner that shifts the portion of the laser beam across the array of light detecting elements to avoid aliasing artifacts in output of the light detecting array. The portion of the image formed by the laser output light may be under-sampled, e.g., in the spatial or time domains. The relevant feature size of an image of an output of a fringe pattern generating element being sampled may comprise a size that is small with respect to the size of individual light detecting elements in the array of light detecting elements. ® KIPO & WIPO 2009</p>
申请公布号 KR20080111503(A) 申请公布日期 2008.12.23
申请号 KR20087026063 申请日期 2007.03.23
申请人 CYMER, INC. 发明人 RAFAC ROBERT J.
分类号 G01B9/02 主分类号 G01B9/02
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