发明名称 Evaluation apparatus and evaluation method
摘要 An evaluation apparatus which evaluates a sample. The apparatus includes a light source which irradiates the sample with light, an imaging spectrometer which spectroscopically measures light reflected by the sample and senses an image, a first calculator which obtains amplitude information on an amplitude of a spectral reflectance of the sample based on the image sensed by the imaging spectrometer within a predetermined wavelength range of spectral reflectance spectra obtained by the spectrometer, a memory which holds in advance relationship information representing a relationship between the amplitude information of the spectral reflectance and an absorption coefficient, and a second calculator which obtains an absorption coefficient of the sample based on the amplitude information obtained by the first calculator and the relationship information held in the memory.
申请公布号 US7468792(B2) 申请公布日期 2008.12.23
申请号 US20070959810 申请日期 2007.12.19
申请人 CANON KABUSHIKI KAISHA 发明人 MASAKI YUICHI;AKINO YUTAKA
分类号 G01J4/00;G01N21/27;G01B9/02;G01J3/28;G01N21/31;G01N21/55;H01L21/02;H01L21/66;H01L27/12 主分类号 G01J4/00
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