| 摘要 |
An atmospheric pressure plasma system is provided to increase stability and a density of a atmospheric pressure plasma and to improve a processing yield according to increasing a collision ionizing process of the electronics. An atmospheric pressure plasma system comprises a housing, an upper electrode(112), a lower electrode(116) and a magnetic force generating part(130). A process gas is flown in at an atmosphere pressure state in the housing. The upper electrode is equipped in the housing. The lower electrode applies a radio frequency power and contains multiple gas exhaust ports. The magnetic force generation part is equipped at a lower part of the lower electrode and increases an electron trajectory between the upper electrode and the lower electrode. |
