POWER TERMINALS FOR CERAMIC HEATER AND METHOD OF MAKING THE SAME

摘要

A ceramic heater is provided that includes a power terminal for connecting a resistive heating element to a power source. An intermediate layer is disposed on an AIN ceramic substrate proximate the resistive heating element. The power terminal is bonded to the intermediate layer by an active brazing material. The intermediate layer is formed of Mo/AIN or W/AIN and has a coefficient of thermal expansion between that of the active brazing material and that of the AIN ceramic substrate so that thermal stress generated in the ceramic substrate can be reduced. ® KIPO & WIPO 2009