发明名称 |
Spatial optical modulator with passivation layer |
摘要 |
Disclosed is an optical modulator including: a substrate; an insulation layer disposed on the substrate; a ribbon layer, a center portion of which is spaced apart from the insulation layer by a predetermined gap; a piezoelectric element that is disposed on the ribbon layer and allows the center portion of the ribbon layer to bend vertically; and a passivation layer that is disposed on the piezoelectric element and comprises a main passivation film.
|
申请公布号 |
US7468825(B2) |
申请公布日期 |
2008.12.23 |
申请号 |
US20060591226 |
申请日期 |
2006.10.31 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
KYOUNG JE-HONG;JANG JAE-WOOK;SONG JONG-HYEONG;KO YUN-JIN;AN SEUNG-DO |
分类号 |
G02B26/08 |
主分类号 |
G02B26/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|