发明名称 |
Optical spot grid array scanning system |
摘要 |
A method for scanning a surface, consisting of focusing an array of optical beams using optics having an axis, so as to illuminate a region of the surface intercepted by the axis, such that each optical beam illuminates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the optical beams is scanned over the respective sub-region in a second direction, which is different from the first direction.
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申请公布号 |
US7468507(B2) |
申请公布日期 |
2008.12.23 |
申请号 |
US20060339044 |
申请日期 |
2006.01.25 |
申请人 |
APPLIED MATERIALS, ISRAEL, LTD. |
发明人 |
ROGERS STEVEN R.;ELMALIACH NISSIM;ELYASEF EMANUEL;LITMAN ALON;NAFTALI RON;MESHULACH DORON |
分类号 |
H01J3/14;H01J5/16;H01J40/14 |
主分类号 |
H01J3/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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