发明名称 METHOD FOR FORMING THIN FILM PHOTOVOLTAIC INTERCONNECTS USING SELF-ALIGNED PROCESS
摘要 Processing steps that are useful for forming interconnects in a photovoltaic module are described herein. According to one aspect, a method according to the invention includes processing steps that are similar to those performed in conventional integrated circuit fabrication. For example, the method can include etches to form a conductive step adjacent to the grooves that can be used to form interconnects between cells. According to another aspect the method for forming the conductive step can be self-aligned, such as by positioning a mirror above the module and exposing photoresist from underneath the substrate at an angle one or more times, and etching to expose the conductive step. ® KIPO & WIPO 2009
申请公布号 KR20080111113(A) 申请公布日期 2008.12.22
申请号 KR20087026469 申请日期 2008.10.29
申请人 APPLIED MATERIALS INC. 发明人 BORDEN PETER G.;EAGLESHAM DAVID
分类号 H01L31/042;H01L21/027 主分类号 H01L31/042
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