| 摘要 |
A front opening interface mechanical standard, or "FIMS", system is disclosed for ensuring proper registration of a pod door (22) against a port door (26) on a load port assembly without the use of guide pins on the port door (26). In a preferred embodiment, the load port assembly includes kinematic pins (27A, 27B) provided to mate within slots on the bottom of a FOUP to provide a fixed and repeatable position of the FOUP on the load port assembly. The load port assembly further includes a pair of latch keys (22) protruding outwardly from the outer surface of the port door (26) for mating within slots (33) of a door latch assembly within the pod door. The load port assembly may further include vacuum seals on the port door (26). In one embodiment, with the above constraints, the load port assembly may initially include removable alignment pins (40). The alignment pins (40) operate in conjunction with a calibration fixture to set the respective and collective heights of the kinematic pins (27A, 27B) on the load port assembly. ® KIPO & WIPO 2009
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