METHOD OF ISOLATING HIGH-PURITY TRICHLOROSILANE FROM REACTION MIXTURE OF METHYLCHLOROSILANES

摘要

FIELD: chemistry. ^ SUBSTANCE: isolation of trichlorosilane from the reaction mixture, obtained from hydroclorination of technological silicon, is accomplished by rectification in two columns with lateral selection of the product. In the first column the selection of the end product is carried out below the feed plate, and in the second column - above the feed plate. The given quantity of the sampling ratio of methyldichlorosilane is from the still of the first column 0.3-0.5. ^ EFFECT: minimum power consumption for the purification with the necessary quality level of trichlorosilane without reduction in its output. ^ 1 tbl, 12 ex