发明名称 |
REACTOR OF HYDROGEN RESTORATION OF SILICON |
摘要 |
FIELD: chemistry. ^ SUBSTANCE: process of hydrogen reduction of trichlorosilane is carried out on heated silicon rods of bases 5. Supply of trichlorosilane to the reactor is then blocked and a filtered mixture of tetrachlorosilane and polysilanechloride are supplied to the inlet nozzle 3 in the cover of reactor 1. A specific flow rate of hydrogen is set. In the reactor the decomposition process of polysilanechloride with simultaneous hydrogenation of the products of decomposition and tetrachlorosilane takes place. As a result of this trichlorosilane is formed, restored on the rod-bases 5 with hydrogen to silicon. ^ EFFECT: possibility of apart from carrying out the main process to additionally process the waste of high-boiling chlorosilane and silicon tetrachloride. ^ 1 dwg |
申请公布号 |
RU2341456(C1) |
申请公布日期 |
2008.12.20 |
申请号 |
RU20070110870 |
申请日期 |
2007.03.23 |
申请人 |
FEDERAL'NOE GOSUDARSTVENNOE UNITARNOE PREDPRIJATIE "GORNO-KHIMICHESKIJ KOMBINAT" |
发明人 |
MURAVITSKIJ STEPAN ALEKSANDROVICH;GAVRILOV PETR MIKHAJLOVICH;REVENKO JURIJ ALEKSANDROVICH;GROMOV GENNADIJ NIKOLAEVICH;LEVINSKIJ ALEKSANDR IVANOVICH;PROCHANKIN ALEKSANDR PETROVICH;RYZHENKOV SERGEJ VLADIMIROVICH |
分类号 |
C01B33/03 |
主分类号 |
C01B33/03 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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