METHOD FOR PRODUCING SILICON THIN FILM OR ISOTOPICALLY ENRICHED SILICON THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a smooth silicon and isotopically enriched silicon thin film each having an isotopic composition equivalent to a raw material without using an electromagnetic separation process and a silane gas as a raw material which are used in the prior art. SOLUTION: A silicon thin film or an isotopically enriched silicon thin film is formed on a substrate by using a halogenated silicon or a halogenated silicon in which silicone isotope is enriched as a raw material and allowing the raw material to react with hydrogen. COPYRIGHT: (C)2009,JPO&INPIT