DIFFERENTIAL PRESSURE SENSOR

摘要

The invention relates to a highly reliable differential pressure sensor, comprising a first measuring diaphragm (5a), arranged on a first support (3), on the exterior of which facing the support (3a) a first pressure (p1) acts, on the interior of which facing away from the first support (3a) at least one electrode (E1, E1') and at least one piezoresistive sensor element (R) for detecting a differential pressure-dependent deflection of the first measuring diaphragm (5a) are arranged, a second measuring diaphragm (5b), arranged on a second support (3b), which extends in parallel to the first measuring diaphragm (5a), on the exterior of which facing the support (3b) a second pressure (p2) acts in the measuring mode, on the interior of which facing away from the second support (3b) at least one second electrode (E2, E2') is arranged which together with a dedicated first electrode (E1, E1') arranged on the first measuring diaphragm (5a) forms a capacitative sensor element for detecting a differential pressure between the first and the second pressure (p1, p2), the first and the second measuring diaphragm (5a, 5b) being arranged in parallel and being firmly interconnected via a mechanical connection (P) that connects an outer edge (21) of the interior of the first measuring diaphragm (5a) to an outer edge (21) of the interior of the second measuring diaphragm (5b) and a spacer (7) of the same height connected to the diaphragm centers of the two measuring diaphragms (5a, 5b).