发明名称 METHOD FOR DISPLAYING WAFER
摘要 A wafer display method is provided to accurately distinguish the count of wafers which are carried in or carried out by indicating wafers in order to be classified into a constant unit number. An wafer display method comprises: a step which indicates a plurality of wafers(WFD) successively loaded in order to be classified on screen at the fixation number; and a step which distinguishes the count of wafers which are carried in or carried out through the classified display. The indicating step comprises indicating the group of wafers with a fixed number in order to be separated. The indicating step comprises indicating wafers longer or shorter or thicker according to a fixed number.
申请公布号 KR20080109968(A) 申请公布日期 2008.12.18
申请号 KR20070058119 申请日期 2007.06.14
申请人 SEMES CO., LTD. 发明人 YANG, JUN HYEOK
分类号 H01L23/544 主分类号 H01L23/544
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