| 摘要 |
PROBLEM TO BE SOLVED: To provide a means capable of restraining the cost from increasing by enhancing lay-out efficiency, by decreasing a resistance of electric power wiring without increasing a chip area of an ink jet substrate. SOLUTION: A through electrode is provided as a means for enhancing the lay-out efficiency, and a cross-sectional area of the through electrode is specified to provide an advantage in production. That is, a cross section of the through electrode is formed not into a conventional circular shape but into an elliptic shape. COPYRIGHT: (C)2009,JPO&INPIT
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