| 摘要 |
PROBLEM TO BE SOLVED: To provide an industrial robot suppressing impact to be imparted to a conveying object, even if holding the conveying object by a mechanical constitution. SOLUTION: This robot 1 is provided with a hand 3 mounted with a wafer 2 thereon, and an articulated arm part 4 having a second arm 6 for holding the hand 3. The hand 3 is provided with a holding part 28 to hold the wafer 2, and an energizing member to energize the holding part 28 in a direction for holding the wafer 2. The second arm 6 is provided with an eccentric member 31 fixed to a position eccentric from a rotation center of the hand 3 to save the holding part 28 from the wafer 2 since the second arm 6 is abutted on the holding part 28 before starting conveying-out of the wafer 2. The eccentric member 31 is moved relatively to the holding part 28 to move the holding part 28 in the direction for holding the wafer 2 according to an elongating/contracting operation of the articulated arm part 4 when conveying out the wafer 2. The holding part 28 starts the holding of the wafer 2 when reducing speed of the elongating/contracting operation of the articulated arm part 4 when conveying out the wafer 2. COPYRIGHT: (C)2009,JPO&INPIT
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