STATIC PRESSURE SLIDER, AND CONVEYING APPARATUS AND PROCESSING APPARATUS HAVING THE SAME

摘要

A static pressure slider having a fixed body (2) and a movable body (3) movable relative to the fixed body (2) with a static pressure fluid layer interposed between the bodies (2, 3). The static pressure slider further has a first conductor layer (25) (26 to 28) and also has a second conductor layer (31A) (32A to 34A) at least a part of which second conductor layer can have a variable distance from the first conductor layer (25) (26 to 28) by the effect of electrostatic force between the first conductor layer (25) (26 to 28) and the second conductor layer (31A) (32A to 34A). A conveying apparatus and processing apparatus having the static pressure slider are also provided. ® KIPO & WIPO 2009