发明名称 |
ELECTROSTATIC ACTUATOR FORMED BY A SEMICONDUCTOR MANUFACTURING PROCESS |
摘要 |
An electrostatic actuator has high-reliability and less variation in characteristics. An electrode (12a) is formed on a substrate (1), and a plurality of partition parts (50a) are formed on the electrode. A vibration plate (19) is formed on the partition parts (50a), and is deformable by an electrostatic force generated by a voltage applied to the electrode (12a) so that an air gap (14a) is formed between the partition parts (50a) by etching a part of a sacrifice layer (14) formed between the electrode (12a) and the vibration plate (19). The partition parts (50a) are formed of remaining parts of the sacrifice layer (14) after the etching.
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申请公布号 |
US2008309734(A1) |
申请公布日期 |
2008.12.18 |
申请号 |
US20080174342 |
申请日期 |
2008.07.16 |
申请人 |
RICOH COMPANY, LTD. |
发明人 |
NISHIMURA MAN ABU;KURODA TAKAHIKO;ABE SHUYA;TANAKA MAKOTO;IRINODA MITSUGU;HASHIMOTO KENICHIROH |
分类号 |
B41J2/045;B41J2/14;B41J2/16 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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