发明名称 THIN FILM TRANSISTOR, METHOD OF FABRICATING THE THIN FILM TRANSISTOR, AND DISPLAY DEVICE INCLUDING THE THIN FILM TRANSISTOR
摘要 A thin film transistor (TFT), a method of fabricating the TFT, and a display device including the TFT are provided. The TFT includes a semiconductor layer having a channel region and source and drain regions is crystallized using a crystallization-inducing metal. The crystallization-inducing metal is gettered by either a metal other than the crystallization-inducing metal or a metal silicide of a metal other than the crystallization-inducing metal. A length and width of the channel region of the semiconductor layer and a leakage current of the semiconductor layer satisfy the following equation: Ioff/W=3.4E-15 L2+2.4E-12 L+c, wherein Ioff (A) is the leakage current of the semiconductor layer, W (mm) is the width of the channel region, L(mum) is the length of the channel region, and "c" is a constant ranging from 2.5E-13 to 6.8E-13.
申请公布号 US2008308809(A1) 申请公布日期 2008.12.18
申请号 US20080138884 申请日期 2008.06.13
申请人 SAMSUNG SDI CO., LTD. 发明人 YANG TAE-HOON;LEE KI-YONG;SEO JIN-WOOK;PARK BYOUNG-KEON
分类号 H01L29/04;H01L21/336 主分类号 H01L29/04
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