发明名称 DOUBLE-TUNING-FORK PIEZOELECTRIC VIBRATION ELEMENT, AND ACCELERATION DETECTION UNIT
摘要 PROBLEM TO BE SOLVED: To provide a double-tuning-fork piezoelectric vibration element excellent in excitation efficiency. SOLUTION: Vibration arm parts 7 and 8 are formed symmetrically with respect to the center axis of this double-tuning-fork piezoelectric vibration element via a space 9, and composed of first vibration parts 7a and 8a, second vibration parts 7b and 8b, and third vibration parts 7c and 8c, respectively. The length of the first vibration parts 7a and 8a is nearly equal to that of the third vibration parts 7c and 8c, and the second vibration parts 7b and 8b are formed longer than the first vibration parts 7a and 8a. At least on one-side surfaces of front and back surfaces of the first, second and third vibration parts 7a, 7b and 7c of the vibration arm part 7, first, second and third groove parts 11a, 11b and 11c are formed, respectively, via bridging parts 13a and 13b. Similarly, at least on one-side surfaces of front and back surfaces of the first, second and third vibration parts 8a, 8b and 8c of the vibration arm part 8, first, second and third groove parts 12a, 12b and 12c are formed, respectively, via bridging parts 14a and 14b. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008306621(A) 申请公布日期 2008.12.18
申请号 JP20070153636 申请日期 2007.06.11
申请人 EPSON TOYOCOM CORP 发明人 WATANABE JUN;SAKURAI TOSHINOBU
分类号 H03H9/19;G01P15/10;H01L41/08;H01L41/09;H01L41/18;H03H9/215 主分类号 H03H9/19
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