| 摘要 |
PROBLEM TO BE SOLVED: To suppress variations in inspection accuracy, due to the different levels of proficiency among workers by easily determining the presence of uneveness in a periodic pattern in an object of inspection. SOLUTION: The defect-inspecting method is constituted of a process of imaging inspection at a plurality of illumination angles to the object to be inspected; a first image analysis process of selecting one or plural pieces of inspection images from a first image characteristic amount in each of the illumination angles, based on the maximum and the minimum of the pixel values of an area to be inspected in the inspection image; a second image analysis process for selecting a specific inspection image from a second image characteristic amount, based on variations of the pixel values of an area to be inspected in the inspection image selected by the first image analysis process; and an evaluation process for determining the presence of inconsistency in the inspecting object based on the first and second image analysis processes. COPYRIGHT: (C)2009,JPO&INPIT
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