发明名称 RESIN SEALING DEVICE AND RESIN SEALING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a mold for compression molding capable of high-quality molding. SOLUTION: A compression-type resin sealing device 100 is capable of forming a closed space M by abutting an upper mold 110 and a lower mold 130, and at least a part of the closed space M composes a cavity 138. The device is equipped with a vacuum circuit 170 capable of decompressing inside the closed space M. The vacuum circuit 170 is composed to be able to switch between a first pressure lower than the atmospheric pressure and a second pressure lower than the atmospheric pressure and higher than the first pressure. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008302535(A) 申请公布日期 2008.12.18
申请号 JP20070149934 申请日期 2007.06.06
申请人 SUMITOMO HEAVY IND LTD 发明人 FUKUOKA MASARU;MIYAMA TOSHIHIDE
分类号 B29C43/36;B29C43/32;B29L31/34;H01L21/56 主分类号 B29C43/36
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