发明名称 OPTICAL ELEMENT HOLDING STRUCTURE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
摘要 An optical element holding structure comprises a first holding member holding an optical element, a second holding member holding the first holding member, a third holding member holding the second holding member, first elastic members positioned between the first and second holding members and can elastically deform in the radial direction and second elastic members positioned between the second and third holding members in a radial direction thereof and can elastically deform in the radial direction, the plurality of first elastic members and the plurality of second elastic members are arranged in a circumferential direction about an optical axis of the optical element as the center, and a phase of the plurality of first elastic members is shifted from a phase of the plurality of second elastic members in the circumferential direction about the optical axis of the optical element as the center.
申请公布号 US2008310036(A1) 申请公布日期 2008.12.18
申请号 US20080129825 申请日期 2008.05.30
申请人 CANON KABUSHIKI KAISHA 发明人 YOSHIDA SETSUO
分类号 G02B7/02 主分类号 G02B7/02
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