METHOD AND APPARATUS FOR LOW COST HIGH RATE DEPOSITION TOOLING

摘要

An apparatus and method for depositing material on an array of substrates. The array of substrates may be moved past one or more sources of deposition material in a first rotational motion. The array of substrates may also be concurrently moved in a second rotational motion. The combination of the first and second rotational motions cause each of the substrates to move about its longitudinal axis without gears and bearings.