| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a display panel having reflection plates with which a reflection plate forming material is exposed by one operation with optimum exposure in simultaneously applying photolithography to the reflection plate forming material existing on an interlayer film and in a contact hole, and further a distance between mutually adjacent reflection plates close to a mask designed value is materialized within a short time period. <P>SOLUTION: The method for manufacturing the display panel having the reflection plates is characterized in that it has steps: to form the interlayer film 18 which has the contact holes 20 formed for respective pixels on a transparent substrate 11; to coat the entire surface of the substrate with the interlayer film 18 formed thereon with the reflection plate forming material 21a composed of a reflection material; to form a photoresist layer 29 on the surface of the reflection plate forming material; and to expose the photoresist layer 29b between pixels 33 with intermediate light quantity and the photoresist layer 29a in the contact holes 20 with whole light quantity by one operation, by using a multi-gradation mask such as a halftone mask 30 or the like with which the whole light quantity and the intermediate light quantity are obtainable. <P>COPYRIGHT: (C)2009,JPO&INPIT |
