| 摘要 |
PROBLEM TO BE SOLVED: To raise an yield of a product by enhancing the absolute dimensional accuracy of a PWB alignment mark and the detecting accuracy of the center of gravity of a TAB (tape automatic bonding) alignment mark and by making the sticking accuracy of ACF for bonding rough in order to perform accurately mutual positioning before bonding substrate patterns of both PWB and TAB used for a BTJ head. SOLUTION: To avoid the erosion of an alignment mark during PWB etching, a bank pattern for avoiding the erosion is further increased in the neighborhood of the PWB alignment mark. By making the TAB alignment mark as a cavity structure, regardless of the strength of a light beam for detecting the permeation of an image, the center of gravity of the TAB alignment mark is made to be apparently constant. During etching the PWB alignment mark, an electricity-carrying pattern for plating is arranged so as to make a detour for an ACF sticking position. COPYRIGHT: (C)2009,JPO&INPIT
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