发明名称 METHOD OF WASHING OBJECT AND OBJECT WASHING SYSTEM
摘要 <p>A method of washing an object by exposing the same to a mixed-phase fluid containing a gas and droplets, characterized in that a desired impact strength is produced by regulating of the degree of cavitation at droplet collision which can be generated upon collision of the droplets of the mixed-phase fluid with the object.</p>
申请公布号 WO2008152716(A1) 申请公布日期 2008.12.18
申请号 WO2007JP61969 申请日期 2007.06.14
申请人 AQUA SCIENCE CORPORATION;KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION;YAMASE, MASAO;MORITA, YOSHIHISA;WATANABE, MASAO;SANADA, TOSHIYUKI;SHIROTA, MINORI 发明人 YAMASE, MASAO;MORITA, YOSHIHISA;WATANABE, MASAO;SANADA, TOSHIYUKI;SHIROTA, MINORI
分类号 B08B3/02;H01L21/304 主分类号 B08B3/02
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