| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide screening method and manufacturing method for discovering the defects of a laminated actuator, with high accuracy. <P>SOLUTION: A circuit wherein the laminated actuator 50, consisting of a piezoelectric ceramics layer 51 and an electrode layer which are mutually laminated, and a resistor R2 are connected in series, is formed, and thereafter, a DC voltage V1 of not higher than 1.7 kV/mm is impressed on the circuit, to obtain the resistance value R1 of the laminated actuator from the voltage measuring value V2 of the resistor R2 and to decide whether failures exist, from the transition of resistance value R1 of the laminated actuator. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
