发明名称 METHOD FOR PRODUCING ORGANIC THIN FILM
摘要 PROBLEM TO BE SOLVED: To provide a method for inexpensively producing an organic thin film of an acene-based polycyclic aromatic hydrocarbon, which can produce the thin film into a uniform film thickness of a nano-order level, and can precisely control the film thickness of the thin film to be obtained. SOLUTION: The method for producing the organic thin film from an organic solute containing the acene-based polycyclic aromatic hydrocarbon includes the steps of: (1) dissolving the organic solute into a carbon dioxide solvent phase in a supercritical state at the solute dissolution temperature and at the solute dissolution pressure to form a dissolved solute phase in a supercritical state; (2) passing the dissolved solute phase in the supercritical state through a heating nozzle at a temperature before the expansion to expand the phase into a reduced pressure phase; and (3) spraying the reduced pressure phase obtained in the step (2) onto a heated substrate to precipitate the organic solute and form the organic thin film. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008303416(A) 申请公布日期 2008.12.18
申请号 JP20070150123 申请日期 2007.06.06
申请人 SHINSHU UNIV;KRI INC 发明人 UCHIDA HIROHISA;YAMAGUCHI KOICHI
分类号 C23C14/12;H01L21/363 主分类号 C23C14/12
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