发明名称 |
Pore Sealing and Cleaning Porous Low Dielectric Constant Structures |
摘要 |
A micellar solution is used to seal pores exposed at the bottom and sidewall surfaces of a structure etched in or through a porous low dielectric constant material. The micellar solution is also effective to clean away etch residues from the etched structure.
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申请公布号 |
US2008311752(A1) |
申请公布日期 |
2008.12.18 |
申请号 |
US20080063010 |
申请日期 |
2008.02.05 |
申请人 |
FREESCALE SEMICONDUCTOR, INC |
发明人 |
SHARMA BALGOVIND |
分类号 |
H01L21/306;C11D11/00 |
主分类号 |
H01L21/306 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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