| 摘要 |
A support assembly is provided to perform a single dry etch process in a single chamber as remote plasma generation, heating and cooling are made. A support assembly(300) comprises a body(380), a vacuum pipe(313), a heat transfer fluid conduit(361), a gas pipe(335). The body is materially disc-shaped. The vacuum pipe, heat transfer fluid conduit and gas pipe are combined in the body. The body of disc-shaped comprises a top surface(382), a bottom surface(384), a cylindrical outside surface(388), a thermocouple, a flange(390), a fluidic channel(360), a groove(316), a hole and a body gas pipe. The thermocouple is built in the body of disc-shaped. The flange is radially extended from the cylindrical outside surface to outside. The fluidic channel is formed at the flange and bottom surface vicinity in the body of disc-shaped. The groove is formed within the top surface of the body of disc-shaped. The hole unites one or more grooves with the vacuum pipe of shaft. The body gas pipe is formed through the body of disc-shaped. The body gas pipe unites the gas pipe of shaft with the cylindrical outside surface. |
