摘要 |
<P>PROBLEM TO BE SOLVED: To form an LED having a columnar nano rod by causing an oxidation reaction through the use of a photo-electrochemical pec reaction. <P>SOLUTION: The surface of the LED is plated with a thin metal film layer and is thermally treated. Then, a mask is formed of metal granules. Portions which are not protected by the mask are etched, and the mask of metal granules is removed, thus the columnar nano rod is formed. Thereafter, a certain current is fed to the LED formed with the columnar nano rod using a photo-electrochemical pec reaction. An oxidation layer 106 is formed on the surface area of the material excluding a p-type semiconductor material by radiating light of a mercury lamp. Finally, the metal layer 107 is plated again, and the p-type semiconductor material is brought into conduction. Thus, the LED having the columnar nano rod is formed. <P>COPYRIGHT: (C)2009,JPO&INPIT |