发明名称 |
Mems moving platform with lateral zipping actuators |
摘要 |
A MEMS platform with four actuators and four corresponding actuation electrodes. Movement of the platform in the x-y lateral plane is controlled by voltages applied to the four actuation electrodes. Other embodiments are described and claimed.
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申请公布号 |
US2008309191(A1) |
申请公布日期 |
2008.12.18 |
申请号 |
US20070818315 |
申请日期 |
2007.06.14 |
申请人 |
CHOU TSUNG-KUAN ALLEN;MA OING |
发明人 |
CHOU TSUNG-KUAN ALLEN;MA OING |
分类号 |
H02N1/00;B81B7/02 |
主分类号 |
H02N1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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