SPIN COAT DEVICE, AND SPIN COAT METHOD

摘要

PROBLEM TO BE SOLVED: To prevent degradation of quality of a manufactured optical disk by preventing drawing of a UV curable resin in a lower part of a center cap when the center cap is removed in a spin coat step. SOLUTION: When spin coat is performed in a layer forming step of an optical disk, a lower space S of the center cap leads to its peripheral space through a ventilation hole 56 provided in a rotation mechanism of a spin coat device, so that the lower space S of the center cap is not hermetically sealed. COPYRIGHT: (C)2009,JPO&INPIT