| 发明名称 |
METHOD AND APPARATUS FOR FAST AND LOCAL ANNEAL OF ANTI-FERROMAGNETIC (AF) EXCHANGE-BIASED MAGNETIC STACKS |
| 摘要 |
A method (and structure) of thermally treating a magnetic layer of a wafer, includes annealing, for a predetermined short duration, a magnetic layer of a single wafer.
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| 申请公布号 |
US2008308537(A1) |
申请公布日期 |
2008.12.18 |
| 申请号 |
US20080193786 |
申请日期 |
2008.08.19 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
KLOSTERMANN ULRICH KARL;RABERG WOLFGANG;TROUILLOUD PHILIP |
| 分类号 |
B23K26/00;H01L21/00 |
主分类号 |
B23K26/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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