| 摘要 |
A coating apparatus which does not require a heating chamber nor a cooling chamber is provided. An object (14) to be coated moves in an X axis direction, and on the object, an ejector (31) and laser irradiation apparatuses (32a, 32b), which can reciprocate in a Y axis direction, are arranged. An organic material ejected on a part of the surface of the object (14) from the ejector (31) is irradiated with laser beams, dried or polymerized by heating, and formed into a thin film. Moving of the ejector (31) and the laser irradiation apparatuses (32a, 32b) in the Y axis direction and moving of the object (14) in the X axis direction are repeatedly performed, and a thin film made of the organic material is formed on a prescribed region of the object (14). Since coating and laser beam irradiation can be performed parallel, operation efficiency is high. Further, since the temperature of the object (14) does not become high, a cooling process is not required. ® KIPO & WIPO 2009 |
