发明名称 SEMICONDUCTOR LIGHT-EMITTING ELEMENT AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor light-emitting element capable of simplifying a process of forming a light containment structure, and its manufacturing method. SOLUTION: The semiconductor light-emitting element 1 having a vertical resonator has a first mirror layer 24 formed to be smaller in its sectional area on a plane orthogonal to a semiconductor lamination direction than a sectional area of an active layer 21 in a mesa 20. At least a part of a reinforcing member 40 surrounding the first mirror layer 24 is provided together with the layer 24 between the active layer 21 and a substrate 11. A groove where the reinforcing member 40 is embedded is formed by etching the first mirror layer 24 using a clad layer 27 formed in the lowermost layer of the mesa 20 as an etch-stop layer. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008305922(A) 申请公布日期 2008.12.18
申请号 JP20070150816 申请日期 2007.06.06
申请人 HAMAMATSU PHOTONICS KK 发明人 SUZUKI NORIHITO;IIDA DAISUKE
分类号 H01S5/183 主分类号 H01S5/183
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