| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pattern correction method capable of correcting an electrode disconnection part by a narrow line of about 10μm, and with less contamination around the periphery of a defective part. <P>SOLUTION: In the pattern correction method of the present invention, the surface of a film 3 is irradiated with a laser light, then a hole 3a having a shape substantially equal to a correction pattern to be plotted is formed; a groove 3c connected to a part overlapping the electrode 2 in the hole 3a and extending in the same direction as that of the electrode 2 is formed; and the surface with the formed groove 3c of the film 3 is made to face a substrate 1, with a gap interposed in between them so that, viewing from above; a part of the hole 3a may overlap a part of the electrode 2; the film 3 is pressurized against the substrate 1 in a prescribed range, including the hole 3a and the groove 3c; and a correction paste 10 is applied to the substrate 1 via the hole 3a. Consequently, the correcting paste 10 in a crossing section can escape into the groove 3c, and then the correcting paste 10 is prevented from sticking in the periphery of the crossing section. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
