| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an organic EL element having an organic compound layer free from defects by preventing deposited particles from clustering. SOLUTION: The state of the deposited particles flying in a zone just above a deposition source 21 is monitored by a light-shielding type particle monitor 4 which divides a laser beam outputted from a laser beam source 41 into two polarized beams and receives them with two light receiving elements of a sensor 42. The clustering of the deposited particles is detected by fetching signals having different phases by comparing the outputs of the two light receiving elements of the particle monitor 4. When a cluster is generated, the power of a deposition power source 23 is saved by a control PC 44. COPYRIGHT: (C)2009,JPO&INPIT
|
