SAFETY DEVICE OF OZONE GAS FEED SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a safety device detecting the decomposition of ozone gas when the decomposition occurs in an ozone gas feed system, thereby interrupting the feed of ozone gas. SOLUTION: The safety device is used in the ozone gas feed system wherein an ozone gas generation apparatus (1) and an ozone gas utilization apparatus (2) are connected with an ozone supply path (3) and the ozone gas generated in the ozone gas generating apparatus (1) is fed to the ozone gas utilization apparatus (2). Abnormal variation of the pressure or the temperature of the ozone gas flowing through the ozone gas supply path (3) in the ozone gas utilization apparatus (2) side is detected by a sensor (7). The detected signal from the sensor (7) is inputted in an abnormal state judging apparatus (9) and the flow of the ozone gas flowing the ozone gas supply path (3) is controlled based on the abnormal state judgement in the abnormal judging apparatus (9). COPYRIGHT: (C)2009,JPO&INPIT