发明名称 |
GRADED TOPCOAT MATERIALS FOR IMMERSION LITHOGRAPHY |
摘要 |
A topcoat material for immersion lithography and a method of performing immersion lithography using the topcoat material. The topcoat material includes a mixture of a first polymer and a second polymer. The first and second polymers of the topcoat material, when the topcoat material is formed into a topcoat layer between an immersion fluid and a photoresist layer, disperse non-homogenously throughout the topcoat layer.
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申请公布号 |
US2008311506(A1) |
申请公布日期 |
2008.12.18 |
申请号 |
US20080058893 |
申请日期 |
2008.03.31 |
申请人 |
ALLEN ROBERT D;BROCK PHILLIP;SANDERS DANIEL P;SUNDBERG LINDA K |
发明人 |
ALLEN ROBERT D.;BROCK PHILLIP;SANDERS DANIEL P.;SUNDBERG LINDA K. |
分类号 |
G03F7/004;G03F7/30 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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