| 摘要 |
PROBLEM TO BE SOLVED: To provide a system capable of determining the defect distribution of an element quickly by an inspection method of a ferroelectric or a piezoelectric body. SOLUTION: The inspection system includes: a DC power supply section 21 capable of applying a fixed voltage across a lower electrode 2 and an upper electrode 4 of a ferroelectric element 5, a lens 23 (light reception section) capable of receiving fluorescence having fixed photon energy for collection in fluorescence emitted by a carrier generated with a fixed voltage in the ferroelectric 3, and a processor 25 (determination section) capable of determining defect distribution according to the distribution of a fluorescent image. COPYRIGHT: (C)2009,JPO&INPIT
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