| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring apparatus and its measuring method which can measure the surface profile of a test object in a short time. SOLUTION: The measuring apparatus 1 includes: an XY stage 12 which is movable while holding the test object 2; an X-driving mechanism 12a and a Y-driving mechanism 12b for moving the XY stage; and a plurality of sensors 30, 40, 50, 60, 70 which irradiate slit lights, propagating in a flat space, to the test object and receive the reflected lights of the slit lights to measure the shape of the test object. The plurality of sensors are arranged at different positions so that they surround the XY stage, and a plurality of slit lights irradiated by at least two sensors nearly overlap one another to form a measuring surface. The X-driving mechanism and the Y-driving mechanism move the XY stage in a direction crossing the measuring face. COPYRIGHT: (C)2009,JPO&INPIT
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