SUBSTRATE STAGE, HEAT TREATMENT EQUIPMENT AND PROCESS FOR MANUFACTURING SUBSTRATE STAGE

摘要

PROBLEM TO BE SOLVED: To provide a substrate stage having high abrasion resistance and not causing stripping charge. SOLUTION: On the surface 12 for mounting a substrate W formed on a stage main body 11, a predetermined emboss shape E is formed by embossing and then an alumina film A under amorphous state is formed by anodization. The alumina film A of amorphous structure is minute and firm. Consequently, it has high abrasion resistance and can prevent stripping charge substantially. COPYRIGHT: (C)2009,JPO&INPIT