| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device in which an image disturbance generated in a display image is avoided and a clear display image can be obtained. SOLUTION: A display image 102 to be displayed in an image display portion is a square composed only of sides along either axis of rectangular coordinates 105, 106 of a rectangular coordinate system determined by a wafer alignment respectively. Moreover, by scanning a charged particle beam in a direction 108 in parallel with neither of axes of the standard rectangular coordinate system, only information in an area included in the display image 102, among an image information obtained by irradiating the charged particle beam to a region including the display image 102, is displayed in the image display portion to obtain a clear display image without luminance unevenness. COPYRIGHT: (C)2009,JPO&INPIT
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